Beam processing apparatus

A beam processing apparatus that irradiates a workpiece with a processing beam,

• the beam processing apparatus comprising:
• a beam irradiation apparatus that includes:
• an irradiation optical system that emits the processing beam;
• and a beam irradiation position change member that is disposed on an optical path of the processing beam and that changes an irradiation position of the processing beam on the workpiece;
• a position change apparatus that changes a positional relationship between the irradiation optical system and the workpiece;
• and
• a control apparatus that controls the beam irradiation apparatus, wherein
• the control apparatus is configured to:
• (i) control the beam irradiation apparatus to perform a removal processing of a first part of the workpiece by irradiating a first surface of the workpiece with the processing beam while moving the irradiation position of the processing beam along a first direction, and to perform a removal processing of a second part of the workpiece by irradiating a second surface of the workpiece, which is formed at the workpiece by the removal processing of the first part, with the processing beam while moving the irradiation position of the processing beam along the first direction within a moving range smaller than a moving range for performing the removal processing of the first part,
• (ii) control the position change apparatus to change the positional relationship between the irradiation optical system and the workpiece after the removal processing of the first and second parts are performed, and
• (iii) after the positional relationship between the irradiation optical system and the workpiece is changed, control the beam irradiation apparatus to perform a removal processing of a third part of the workpiece, which is adjacent to a position where the first part has been removed along the first direction, by irradiating the first surface of the workpiece with the processing beam while moving the irradiation position of the processing beam along the first direction, and to perform a removal processing of a fourth part of the workpiece, which is adjacent to a position where the second part has been removed along the first direction, by irradiating a third surface of the workpiece, which is formed at the workpiece by the removal processing of the third part, with the processing beam while moving the irradiation position of the processing beam along the first direction.