Liquid trap tank and liquid supply unit for the liquid trap tank
AssigneeSemes Co., Ltd.
InventorsWoo Sin Jung, Young Choi, Dae Sung Kim, Hae Kyung Kim, Dongwoon Park
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AssigneeSemes Co., Ltd.
InventorsWoo Sin Jung, Young Choi, Dae Sung Kim, Hae Kyung Kim, Dongwoon Park
Estimating the term…
A liquid trap tank and a liquid supply unit for the liquid trap tank are provided. The liquid trap tank includes a tank body which has an accommodating space formed therein to accommodate a liquid and has an inlet portion formed on one side and an outlet portion formed on an opposite side; and a liquid supply unit coupled to the inlet of the tank body to supply the liquid from the outside of the tank body to the accommodating space, wherein the liquid supply unit comprises an inlet pipe portion coupled to the inlet portion to introduce the liquid into the accommodating space and a flow directing portion connected to the inlet pipe portion and configured to induce a flow of the liquid to suppress generation of air bubbles due to a drop of the liquid passing through the inlet pipe portion.
A liquid trap tank comprising:
A liquid supply unit for a liquid trap tank, which is coupled to an inlet portion of a tank body that has an accommodating space formed therein to accommodate a liquid and has the inlet portion formed on one side and an outlet portion formed on an opposite side and configured to supply the liquid to the accommodating space from the outside of the tank body, the liquid supply unit comprising:
A liquid trap tank comprising:
Dependencies are inferred from the claim text.