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US 12,591,172 B2Granted
EUV transmissive membrane
AssigneeNGK Insulators, Ltd.
InventorsToshikatsu Kashiwaya, Atsuo Kondo, Hiroki Chaen, Takashi Tanimura
Life of this patent
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Abstract
Provided is an EUV transmissive membrane including a main layer composed of metallic beryllium and a protective layer composed of beryllium nitride that covers at least one side of the main layer.
Claims7
An EUV transmissive membrane comprising:
- a main layer composed of metallic beryllium having a thickness of 10 to 70 nm;
- and
- a protective layer composed of beryllium nitride that covers at least one side of the main layer having a thickness of 5 nm or less.
Dependencies are inferred from the claim text.