Inspection device and inspection method with infrared light for scratch detection on inspection target
AssigneeMitsubishi Heavy Industries, Ltd.
InventorsYuki Yano, Nobuyuki Kamihara, Takayuki Moritake, Kohei Kawazoe, Kiwamu Nakajima, Toshinobu Muraki, Yusuke Hashida, Kanata Fujii
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