Device, system and method for voltage generating

A system, comprising:

• a chuck, comprising:
• a first metal structure configured to receive a first supply voltage;
• and
• a wafer disposed above the chuck and comprising:
• a second metal structure disposed in a first semiconductor layer of the wafer, wherein the first and second metal structures are configured to form a first capacitor, the first metal structure corresponds to a first terminal of the first capacitor, and the second metal structure corresponds to a second terminal of the first capacitor,
• wherein the second metal structure is configured to transmit a first voltage in response to the first supply voltage;
• a first enabling circuit disposed in a second semiconductor layer under the first semiconductor layer and configured to generate a first trigger signal;
• a first function circuit disposed in the second semiconductor layer and configured to operate with a second voltage generated associated with the first voltage that is transmitted through a first switch in response to the first trigger signal;
• and
• a first voltage regulator circuit disposed in the second semiconductor layer and configured to receive the first voltage transmitted through the first switch and generate the second voltage in response to the first voltage.

A device in a chamber, comprising:

• at least one die comprising:
• a first voltage generator configured to be charged to have a first induced voltage by induced charges generated in response to a first voltage of a first electrode of a chuck in the chamber,
• wherein the first voltage generator and the first electrode together form a first capacitor, wherein the first electrode corresponds to a first terminal of the first capacitor and the first voltage generator corresponds to a second terminal of the first capacitor;
• a dielectric layer configured to surround the first voltage generator to isolate the first voltage generator from the first electrode;
• a first voltage regulator circuit coupled to the first voltage generator to receive the first induced voltage and configured to generate a first power supply voltage according to the first induced voltage for a first circuit in the device;
• a first enabling circuit disposed in a semiconductor layer and configured to generate a first trigger signal;
• and
• a first function circuit configured to operate with a second voltage generated in association with the first voltage that is transmitted through a first switch in response to the first trigger signal.