Structure estimation system and structure estimation program for estimating height of structure based on data from charged particle beam device

A structure estimation system that estimates, from an observation image of a sample acquired by a charged particle beam apparatus, information about a depth or a height corresponding to the observation image on the sample or to a feature amount extracted from the observation image by one or more computer systems,

• wherein the structure estimation system includes the one or more computer systems and the charged particle beam apparatus configured to irradiate the sample with a charged particle beam, the charged particle beam apparatus including a plurality of shadow image detectors arranged in a direction tilted and axis-symmetrically with respect to a beam optical axis of the charged particle beam to obtain structure data about the structure of the sample,
• wherein the one or more computer systems include a non-transitory computer-readable medium storing a plurality of modules for implementing one or more functions implemented including at least a calculation module,
• wherein the one or more computer systems include an identifier that outputs information about the depth or the height corresponding to the observation image or to the feature amount extracted from the observation image,
• wherein the identifier is configured to receive as an input a composite image obtained by using a plurality of types of background images in which an image is acquired for each of a plurality of different layouts and also by using a plurality of types of foreign object images acquired for each of a plurality of different signal processing conditions, and is configured to output information about the depth or the height corresponding to the observation image or to the feature amount extracted from the observation image, and
• wherein the calculation module acquires, from the identifier, information about the depth or the height corresponding to the observation image or to the feature amount extracted from the observation image by inputting the composite image to the identifier.

A structure estimation system for estimating, from data obtained by a charged particle beam apparatus, information about a depth or a height of a pattern formed on a structure of a sample,

• wherein the structure estimation system includes one or more computer systems and the charged particle beam apparatus configured to irradiate the sample with a charged particle beam, the charged particle beam apparatus including a plurality of shadow image detectors arranged in a direction tilted and axis-symmetrically with respect to a beam optical axis of the charged particle beam to obtain structure data about the structure of the sample,
• wherein the one or more computer systems include a non-transitory computer-readable medium storing a plurality of modules for implementing one or more functions implemented including at least a calculation module,
• wherein the one or more computer systems include an identifier that outputs information about the depth or the height of the pattern formed on the structure of the sample,
• wherein the identifier is configured to receive as an input at least one of:
• an output of the multiple direction detector, which is data obtained by the charged particle beam apparatus, an image formed based on the output, or a feature of the pattern extracted from the image, and is configured to output information about the depth or the height of the pattern formed on the structure of the sample, and
• wherein the calculation module acquires, from the identifier, information about the depth or the height of the pattern formed on the structure of the sample by inputting to the identifier at least one of:
• the output of the multiple direction detector, the image formed based on the output, or the feature of the pattern extracted from the image.