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US 12,560,626 B2Granted
Transitional tapping atomic force microscopy for high-resolution imaging
AssigneeUTI Limited Partnership
InventorsArindam Phani, Seonghwan Kim
Life of this patent
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Abstract
An atomic force microscopy transitional tapping method for surface imaging.
Claims20
An atomic force microscopy tapping method for imaging a surface of a sample, the method comprising:
- determining and setting a free amplitude (A0) of a cantilever of an atomic force microscope (AFM);
- determining and setting an operational tapping amplitude (A) of the cantilever based on the free amplitude (A0);
- initializing and setting a steady-state timescale (τc) of the cantilever interacting with the surface of the sample to be imaged;
- determining an average deformation amplitude (Δa) relative to the operational tapping amplitude (A), the average deformation amplitude (Δa) resulting from the cantilever tapping and deforming the surface of the sample;
- optimizing the steady-state timescale (τc) to correspond with a relaxation timescale (τsurf) of the surface following deformation by the cantilever by setting the condition of reaching the set operational tapping amplitude (A) when the average deformation amplitude (Δa)≠0;
- scanning the surface of the sample by tapping the surface with the cantilever;
- and
- collecting imaging parameters for generating an image of the surface.
5 more elements
Dependencies are inferred from the claim text.