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AssigneeShibaura Electronics Co., Ltd.
InventorsKazumasa Nakamura, Noriyuki Nakayama, Ikuo Yanase
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A thermistor sintered body has a thickness in a range of 1 μm to 100 μm and an area in a range of 1 mm2 to 10 mm2, and is composed of a single body of a sintered body having a composition of NiMn2O4. This thermistor sintered body can be manufactured by a first step of dropping a raw material liquid RL onto a surface of a substrate rotatably supported, a second step of rotating the substrate with the dropped raw material liquid RL and spreading the raw material liquid RL, a third step of forming a sintered body having the composition of NiMn2O4 on the surface of the substrate by heating and holding the raw material liquid RL and the substrate on which the raw material liquid RL has been placed, and a fourth step of separating the sintered body from the substrate.
A thermistor sintered body, wherein the thermistor sintered body has a thickness in a range of 1 μm to 100 μm and an area in a range of 1 mm2 to 10 mm2, and the thermistor sintered body is composed of a single body of a sintered body having a composition of NiMn2O4, wherein in the thermistor sintered body, 40% to 80% of Mn in the NiMn2O4 is substituted with Fe, and the thermistor sintered body has a relative density of 90% or more.
Dependencies are inferred from the claim text.