High throughput powder treatment systems
AssigneeCVD Equipment Corporation
InventorsMaxim S. Shatalov, Paul J. Decker, Samuel J. Wright, William S. Linss
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Abstract
A system for processing powder includes a process tube connected to load lock chamber via a vacuum valve. The load lock chamber includes first and second stations. Each of the first and second stations is configured to receive a barrel containing powder to be treated. A mechanical transfer mechanism is configured to: move a barrel containing powder to be treated from the first station into the process tube; move a barrel containing powder to be treated from the second station into the process tube; move a barrel containing treated powder from the process tube to the first station; and move a barrel containing treated powder from the process tube to the second station.
Claims11
A system for processing powder comprising:
- a process tube connected to a load lock chamber via a vacuum valve, the load lock chamber including first and second stations, each of the first and second stations configured to receive a barrel containing powder to be treated;
- and
- a mechanical transfer mechanism configured to:
- move a barrel containing powder to be treated from the first station into the process tube;
- move a barrel containing powder to be treated from the second station into the process tube;
- move a barrel containing treated powder from the process tube to the first station;
- and
- move a barrel containing treated powder from the process tube to the second station.
A system for processing powder comprising:
- a process tube connected to a load lock chamber via a vacuum valve, the load lock chamber including first and second stations, each of the first and second stations configured to receive a barrel containing powder to be treated;
- and
- a linear transfer mechanism including a transfer arm having a rotary shaft configured to:
- move a barrel containing powder to be treated from the first station into the process tube;
- move a barrel containing powder to be treated from the second station into the process tube;
- move a barrel containing treated powder from the process tube to the first station;
- and
- move a barrel containing treated powder from the process tube to the second station,
- wherein once the barrel containing powder to be treated is moved from the first station into the process tube, the rotary shaft rotates the barrel within the process tube, and
- wherein the process tube is configured to provide one or more treatment processes selected from chemical vapor deposition (CVD), or atomic layer deposition.
Dependencies are inferred from the claim text.