Transfer apparatus capable of suppressing side slip of workpiece lifted by non-contact chuck

A transfer apparatus comprising a non-contact chuck that lifts and holds a workpiece in a non-contact manner, the transfer apparatus further comprising:

• a plurality of ultrasonic vibrators that radiate ultrasonic waves,
• wherein the plurality of ultrasonic vibrators are configured to radiate the ultrasonic waves to generate a standing wave that attracts the workpiece, and are configured for the non-contact chuck to hold the workpiece at a position where forces attracting in a plurality of directions toward outside of the workpiece are balanced when viewed from a direction facing the workpiece,
• wherein the non-contact chuck is a Bernoulli chuck comprising:
• an injection hole for injecting gas, and
• a suction surface formed around the injection hole,
• wherein the suction surface surrounding the injection hole is a flat surface extending along a horizontal direction,
• wherein the injection hole is configured to inject the gas to form a gas layer between the workpiece and the suction face,
• wherein the plurality of ultrasonic vibrators are provided on the suction surface,
• wherein each of the plurality of ultrasonic vibrators is embedded in the suction surface and emits ultrasonic waves downward in the vertical direction.