Method for facilitating demolding upon pattern transfer

Method for facilitating demolding of a substrate from an imprint template, the method comprising:

• providing the template and the substrate in a sandwich arrangement with a structured surface of the template in contact with a target surface of the substrate;
• applying heat to soften a molding layer on the target surface, wherein said molding layer is a thermoplastic material having a minimum glass transition temperature, Tg>50° C. and Young's modulus>1000 MPa, and wherein the molding layer is heated above Tg;
• pressing the sandwich arrangement together to imprint a pattern of the structured surface into the heated molding layer;
• submerging the sandwich arrangement in a cooling liquid to harden the molding layer;
• and separating the template from the patterned substrate, wherein the cooling liquid comprises 10-20% by volume iso-propyl alcohol (IPA) in water and holds a temperature (T2) of 80-100° C.