Calibration device and method for hyperspectral MEMS tunable filter

A method of calibrating a tunable filter, the method comprising:

• applying actuation parameters to the tunable filter, wherein the actuation parameters set a gap between two mirrors of the tunable filter to thereby obtain a desired spectral transmission profile;
• illuminating the tunable filter by a light source;
• capturing images a surface of the tunable filter while being illuminated by the light source;
• executing operations comprising:
• processing the images and identifying interference fringes resulting from interference in the tunable filter;
• determining whether the interference fringes are symmetrically aligned around a certain area of the surface, which indicates that the two mirrors are parallel;
• and
• in case the interference fringes are not symmetrically aligned around the certain area, applying updated actuation parameters for adapting the gap between the mirror and obtaining the desired spectral transmission profile.

A device, comprising:

• a processing circuitry operatively connected to a detector;
• wherein the device is configured to interact with a tunable filter and enable a light source to illuminate the tunable filter with a light beam;
• the processing circuitry is configured to:
• determine, based on different optical responses, each optical response received at the detector from a respective illumination by the light source of a certain spatial portion of the tunable filter, whether a state of the tunable filter, complies with a desired condition;
• and in case it does not, apply updated actuation parameters for bringing the state of the tunable filter to the desired condition.

A system, comprising:

• a device;
• and
• a light source for providing a certain illumination spectrum, the device including:
• a processing circuitry operatively connected to a detector;
• wherein the device is configured to interact with a tunable filter and enable a light source to illuminate the tunable filter with a light beam;
• the processing circuitry is configured to:
• determine, based on different optical responses, each optical response received at the detector from a respective illumination by the light source of a certain spatial portion of the tunable filter, whether a state of the tunable filter, complies with a desired condition;
• and in case it does not, apply updated actuation parameters for bringing the state of the tunable filter to the desired condition and wherein the detector is being held in an optical assembly holder and configured to detect reflection of the illumination of the light source on different portions of the tunable filter.

A method of monitoring a state of a tunable filter, the method comprising:

• applying actuation parameters to the tunable filter;
• illuminating two or more portions of the tunable filter;
• detecting optical response from said one or more portions;
• and
• analyzing optical responses of said illumination from one or more portions and determining a tunable filter-state based thereon and determining if the state of the tunable filter satisfies a predetermined condition.

A non-transitory program storage device readable by a computer, tangibly embodying a computer readable instructions executable by the computer to perform a computerized method of monitoring a state of a tunable filter, the method comprising:

• applying actuation parameters to the tunable filter;
• illuminating two or more portions of the tunable filter;
• detecting optical response from said one or more portions;
• analyzing optical responses of said illumination from one or more portions and determining a tunable filter-state based thereon and determining if the state of the tunable filter satisfies a predetermined condition.

A method for adjusting a tunable filter including movable and static members and a plurality of at least three actuators adapted for controlling a state of said tunable filter by actuating a relative position of the movable member relative to said static member;

• the method comprising:
• illuminating said filter at thereof;
• detecting a plurality of optical responses each optical response obtained in response to the illumination of a plurality of different spatial portions of the tunable filter;
• said detected optical responses being indicative to of state of said tunable filter associated with of geometric parameters of a gap between the movable and static members;
• and
• based on said optical responses, determining updated actuation parameters for operating the plurality of actuators to adjust the state of said tunable filter towards a desired state.