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US 12,508,702 B2Granted
Compact actuators, electrically programmable microscale surface oxide memory actuators and related robotic devices
AssigneeCornell University
InventorsMarc Miskin, Paul McEuen, Itai Cohen, Qingkun Liu
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Abstract
Disclosed are devices, systems, and methods for fabrication of moving, actuatable structures at micron scales that can be electronically controlled using low power and low voltages. Also disclosed are microscale robots having such microscale actuator structures to actuate the robots' movements as well as devices, systems, and methods for fabrication of microscale robots. The disclosed methods of fabrication are compatible with standard semiconductor technologies.
Claims20
An actuator comprising:
- a nanoscale-thickness first material;
- and
- a nanoscale-thickness second material disposed along at least a portion of a surface of the nanoscale-thickness first material,
- wherein the nanoscale-thickness first material has a first surface stress, the nanoscale-thickness second material has a second surface stress different than the first surface stress, and the actuator is configured to assume a first shape in a first state arising from the difference in the first surface stress and the second surface stress, and wherein the nanoscale-thickness first material is capable of an electrochemically-driven adsorption from an aqueous environment, and the actuator is configured to assume a second shape in a second state arising from ion transfer between the nanoscale-thickness first material and the aqueous environment.
1 more element
Dependencies are inferred from the claim text.