Titration module, test apparatus and method for measuring titration contact angles

A test apparatus, comprising:

• a prober, comprising a movable carrier and a probe card, wherein the movable carrier is for carrying a device under test, and the probe card is located above the device under test;
• a titration module, comprising a base, at least one titration unit, a contact angle measurement module, and a computing unit, wherein the at least one titration unit is disposed above the base for titrating a globule onto the device under test, the contact angle measurement module is disposed above the base, and is provided for measuring a first height and a first radius of the globule, and wherein the first height relates to the maximum height of the globule in a longitudinal direction, the first radius relates to the radius of the maximum projected area of the globule in a longitudinal direction, and the longitudinal direction is orthogonal to a contact surface between the globule and the device under test;
• and wherein the computing unit calculates a second radius according to the first height and the first radius, and the computing unit calculates a contact angle of the globule according to the first height and the second radius;
• and
• a test head, comprising a test circuit board electrically connected with the probe card;
• wherein the contact angle measurement module comprises a height measurement laser module and a camera module, and wherein the height measurement laser module is for measuring the first height from above the globule;
• and the camera module is for measuring the first radius from above the globule;
• wherein the computing unit compares the first height and the first radius, and wherein in response to determining that the first height is greater than the first radius, the computing unit calculates the second radius and the contact angle of the globule through the following formula:
• r
• ⁢
• ⁢
• 2
• =
• 2
• ⁢
• r
• ⁢
• ⁢
• 1
• ⁢
• h
• ⁢
• ⁢
• 1
• -
• h
• ⁢
• ⁢
• 1
• 2
• ;
• and
• θ
• =
• 2
• ⁢
• tan
• -
• 1
• ⁡
• (
• h
• ⁢
• ⁢
• 1
• r
• ⁢
• ⁢
• 2
• )
• ;
• wherein r1 is defined as the first radius, θ is defined as the contact angle, h1 defined as the first height, and r2 defined as the second radius.

A method for measuring titration contact angles, implemented with a titration module comprising a base, a titration unit disposed above the base for titrating a globule onto a device under test, a contact angle measurement module, disposed above the base, comprising a height measurement laser module and a camera module, and a computing unit, wherein the method comprises the following steps:

• by the height measurement laser module, measuring the first height from above the globule, and by the camera module, measuring the first radius from above the globule, wherein the first height relates to the maximum height of the globule in a longitudinal direction, the first radius relates to the radius of the maximum projected area of the globule in a longitudinal direction, and the longitudinal direction is orthogonal to a contact surface between the globule and the device under test;
• and
• by the computing unit, calculating a second radius according to the first height and the first radius, and calculating a contact angle of the globule according to the first height and the second radius;
• wherein the method further comprises the following steps:
• by the computing unit, comparing the first height with the first radius;
• and
• in response to determining that the first height is greater than the first radius, calculating the second radius and the contact angle of the globule through the following formula by the computing unit:
• r
• ⁢
• ⁢
• 2
• =
• 2
• ⁢
• r
• ⁢
• ⁢
• 1
• ⁢
• h
• ⁢
• ⁢
• 1
• -
• h
• ⁢
• ⁢
• 1
• 2
• ;
• and
• θ
• =
• 2
• ⁢
• tan
• -
• 1
• ⁡
• (
• h
• ⁢
• ⁢
• 1
• r
• ⁢
• ⁢
• 2
• )
• ;
• wherein r1 is defined as the first radius, θ is defined as the contact angle, h1 defined as the first height, and r2 defined as the second radius.