Shape measuring and vibration detection

A shape measuring apparatus comprising:

• a measurement probe, having a main body, configured to measure a distance from a portion to be measured of an object by irradiating the portion to be measured with measurement light;
• a strain gauge attached to the main body of the measurement probe, which is configured to output a signal;
• a movement mechanism configured to move the measurement probe;
• and
• a measurement control device configured to:
• control an operation of the measurement probe and an operation of the movement mechanism, so as to perform a distance measurement on a plurality of portions to be measured of the object to perform a shape measurement,
• detect a residual vibration of the measurement probe based on the signal output by the strain gauge, immediately stop the operation of the movement mechanism and retract the movement mechanism in accordance with the sensing signal, and perform the measurement by the measurement probe after waiting for an amount of residual vibration of the movement mechanism to attenuate to a predetermined amount,
• wherein the measurement control device is configured to:
• instruct the movement mechanism to move the measurement probe to a target position,
• measure the distance from the portion to be measured by the measurement probe,
• determine a position to which the measurement probe has actually moved,
• calculate an error between the position to which the measurement probe has actually moved and the target position,
• correct the position of the measurement probe by the movement mechanism based on the calculated error,
• cause the measurement probe to perform the distance measurement at a corrected position.