Edge exposure apparatus and light source output control method

An edge exposure apparatus for performing an edge exposing process by irradiating a light to an edge region of a substrate, the edge exposure apparatus comprising:

• a support unit configured to support the substrate;
• a light irradiation unit having a light source for irradiating the light on the substrate;
• and
• a control unit configured to control an output of the light source, and
• wherein the control unit comprises:
• a measurement unit configured to measure illuminance values according to the outputs of the light source;
• and
• an output control unit configured to set a reference illuminance value among the measured illuminance values by the measurement unit and to control the output of the light source based on the set reference illuminance value, and
• wherein the edge exposure apparatus is configured to perform the edge exposing process after a main exposing process performed by an external exposure module.