Sensor device
AssigneeKoa Corporation
InventorsYasuyuki Katase, Toshiya Yasue
Life of this patent
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Abstract
An object is to provide a sensor device capable of highly accurately detecting a flow rate at 360 degrees in a radial direction with respect to a first sensor element including a resistive element for flow rate detection. A sensor device according to the present invention includes a substrate, a first sensor element including a resistive element for flow rate detection, and a second sensor element including a resistive element for temperature compensation. Each of the first sensor element and the second sensor element is supported to be separated from a surface of the substrate via a pair of lead wires, and the first sensor element is disposed at a higher position than the second sensor element.
Claims5
A sensor device comprising:
- a substrate;
- a first sensor element including a resistive element for flow rate detection;
- and
- a second sensor element including a resistive element for temperature compensation, wherein
- each of the first sensor element and the second sensor element is supported to be separated from a surface of the substrate via a pair of lead wires,
- the first sensor element is disposed at a position higher than the second sensor element,
- the first sensor element and the second sensor element are connected to the pairs of lead wires so that the first sensor element and the second sensor element face inward,
- a first distance between the pair of lead wires that are connected to the first sensor element and to the substrate is constant from the surface of the substrate to a height at which the flow-rate detection resistive element is mounted,
- a second distance between the pair of lead wires that are connected to the second sensor element and to the substrate is constant from the surface of the substrate to a height at which the temperature-compensation resistive element is mounted, and
- the first distance at the surface of the substrate is wider than the second distance at the surface of the substrate.
Dependencies are inferred from the claim text.