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US 12,481,222 B2Granted
Method and device for the exposure of a photosensitive coating
AssigneeEV Group E. Thallner GmbH
InventorsBernhard Thallner, Boris Povazay, Tobias Zenger, Thomas Uhrmann
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Abstract
The invention relates to a method and a device for the exposure of a photosensitive coating.
Claims17
A method for exposure of a photosensitive coating, the photosensitive coating including at least a first photosensitive area and a second photosensitive area, the method comprising in the following sequence:
- exposing the photosensitive coating to photons of a first wavelength during which the first photosensitive area of the coating reacts to the photons of the first wavelength, and
- exposing the photosensitive coating to photons of a second wavelength during which the second photosensitive area of the coating reacts to the photons of the second wavelength,
- wherein the first wavelength is different from the second wavelength,
- wherein the photosensitive coating is exposed by means of a dynamically controllable unit, and
- wherein the first photosensitive area and the second photosensitive area are within a depth of field of a projection of the dynamically controllable unit.
2 more elements
A device for the exposure of a photosensitive coating, the photosensitive coating including at least a first photosensitive area and a second photosensitive area, the device comprising:
- a radiation device configured to:
- expose the photosensitive coating to photons of a first wavelength during which the first photosensitive area of the photosensitive coating reacts to the photons of the first wavelength;
- and
- expose the photosensitive coating to photons of a second wavelength during which the second photosensitive area of the photosensitive coating reacts to the photons of the second wavelength;
- and
- a dynamically controllable unit configured to expose the photosensitive coating to the pholons of the first and second wavelengths,
- wherein the first wavelength is different from the second wavelength, and
- wherein the first photosensitive area and the second photosensitive area are within a depth of field of a projection of the dynamically controllable unit.
5 more elements
Dependencies are inferred from the claim text.