Charged particle microscope and stage

Abstract

A charged particle microscope includes an electron gun provided inside a barrel and a stage 20. In the stage 20, a sample holder 30 holding a sample SAM can be installed. The stage 20 includes an annular rough movement stage member 21a and an annular fine movement stage member 21b. An X rough movement actuator 22a and a Y rough movement actuator 23a are connected to the rough movement stage member 21a. An X fine movement actuator 22b and a Y fine movement actuator 23b are connected to the fine movement stage member 21b. Here, a first movable range in which the X rough movement actuator 22a and the Y rough movement actuator 23a are able to move the rough movement stage member 21a is broader than a second movable range in which the X fine movement actuator 22b and the Y fine movement actuator 23b are able to move the fine movement stage member 21b. Accordingly, it is possible to improve performance of the charged particle microscope.

Dependencies are inferred from the claim text.