Methods and systems for temperature control for a substrate

A system comprising:

• a memory;
• and
• a set of one or more processing devices, wherein the set of one or more processing devices is to:
• responsive to detecting that a container is received at a load port,
• determine a type of parts of the system for storage at the container;
• identify, from the memory, one or more mapping patterns associated with the determined type of parts;
• cause a detection system of one or more robot arms of a factory interface to be moved according to the identified one or more mapping patterns to detect one or more parts stored by the container;
• determine, based on the movement of the one or more robot arms according to the identified one or more mapping patterns, a mapping of the container, wherein the mapping of the storage container indicates regions of the container that stores one or more detected parts and a position of each of the one or more detected parts stored at a respective region;
• record, in the memory, the mapping of the container;
• and
• based on the determined mapping, causing, by the system controller, the one or more robot arms to perform at least one of:
• removing at least one of the one or more detected parts from the container, or
• placing an additional part in the container.

A system comprising:

• a factory interface;
• a load port connected to the factory interface;
• a robot arm comprising a detection system at a distal end of an end effector of the robot arm, and wherein the detection system comprises an emitting component and a sensing component, and wherein the detection system detects an object responsive to a beam directed from the emitting component to the sensing component being broken by the object;
• and
• a system controller operatively connected to the robot arm, wherein the system controller is to:
• responsive to detecting that a container is received at the load port,
• determine a type of parts of the system for storage at the container;
• identify, from a storage medium, one or more mapping patterns associated with the determined type of parts;
• cause the detection system of the robot arm to be moved according to the identified one or more mapping patterns to detect one or more parts stored by the container;
• determine, based on the movement of the detection system according to the identified one or more mapping patterns, a mapping of the container, wherein the mapping of the storage container indicates regions of the container that stores one or more detected parts and a position of each of the one or more detected parts stored at a respective region;
• record, in the storage medium, the mapping of the container;
• and
• based on the determined mapping, causing the robot arm to perform at least one of:
• removing at least one of the one or more detected parts from the container, or
• placing an additional part in the container.