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US 12,436,034 B2Granted
Ferroelectric sensor
AssigneeTDK Electronics Co., Ltd.
InventorsSandro Kappert, Stefan Sax, Johann Pichler
Life of this patent
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Abstract
A sensor (1) which consists of a first electrode (3a), a ferroelectric layer (2) and a second electrode (3b) is described. The second electrode (3b) is connected to ground and the ferroelectric layer (2) is arranged between the first and second electrodes (3a, 3b).
Claims33
A sensor comprising:
- a first electrode;
- a ferroelectric layer;
- a second electrode, wherein the second electrode is connected to ground and the ferroelectric layer is arranged between the first and second electrodes;
- and
- a carrier material and at least one mechanical amplifier element,
- wherein the at least one mechanical amplifier element is arranged on at least one of the first electrode, the second electrode or the carrier material, and
- wherein the at least one mechanical amplifier element is an extension of the first electrode and/or the carrier material in an axial direction.
4 more elements
Dependencies are inferred from the claim text.