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US 12,424,410 B2Granted
RF pulsing within pulsing for semiconductor RF plasma processing
AssigneeLam Research Corporation
InventorsMaolin Long, Yuhou Wang, Ying Wu, Alex Paterson
Life of this patent
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Abstract
A system and method for generating a radio frequency (RF) waveform are described. The method includes defining a train of on-off pulses separated by an off state having no on-off pulses. The method further includes applying a multi-level pulse waveform that adjusts a magnitude of each of the on-off pulses to generate an RF waveform. The method includes sending the RF waveform to an electrode.
Claims20
A matchless plasma source comprising:
- an amplification circuit configured to receive a filtered waveform, wherein the amplification circuit is configured to provide an amplified waveform based on the filtered waveform, wherein the filtered waveform includes a first series of clock pulses followed by a state, wherein the state is followed a second series of clock pulses;
- a controller coupled to the amplification circuit, wherein the controller is configured to control a shape of the amplified waveform to facilitate providing a shaped waveform;
- and
- a reactive circuit coupled to the amplification circuit to remove harmonics from the shaped waveform to provide a sinusoidal radio frequency (RF) signal to an electrode.
1 more element
A plasma tool comprising:
- a plasma chamber having an electrode;
- and
- a matchless plasma source coupled to the plasma chamber, the matchless plasma source including:
- an amplification circuit configured to receive a filtered waveform, wherein the amplification circuit is configured to provide an amplified waveform based on the filtered waveform, wherein the filtered waveform includes a first series of clock pulses followed by a state, wherein the state is followed a second series of clock pulses;
- a controller coupled to the amplification circuit, wherein the controller is configured to control a shape of the amplified waveform to facilitate providing a shaped waveform;
- and
- a reactive circuit coupled to the amplification circuit to remove harmonics from the shaped waveform to provide a sinusoidal radio frequency (RF) signal to the electrode.
4 more elements
A method comprising:
- receiving a filtered waveform, wherein the filtered waveform includes a first series of clock pulses followed by a state, wherein the state is followed a second series of clock pulses;
- generating an amplified waveform based on the filtered waveform;
- controlling a shape of the amplified waveform to facilitate providing a shaped waveform;
- and
- removing harmonics from the shaped waveform to provide a sinusoidal radio frequency (RF) signal to an electrode.
2 more elements
Dependencies are inferred from the claim text.