Capacitive sensor device and a magnetic bearing assembly with such capacitive sensor device

A magnetic bearing assembly in a system for contactless linear displacement along a linear displacement path of a rigid body relative to another rigid body, the magnetic bearing assembly comprising:

• at least one first static back iron being mounted to the rigid body;
• and
• at least one magnetic bearing module being mounted to the other rigid body and consisting of at least:
• a ferromagnetic core;
• a first magnetic element positioned on a first side of the ferromagnetic core facing the first static back iron;
• a coil being wound around the ferromagnetic core;
• and
• a capacitive sensor device for determining a distance between a rigid body and another rigid body in a system for contactless linear displacement along a linear displacement path of the rigid body relative to the other rigid body, the capacitive sensor device comprising:
• a capacitive sensor component with a first sensor node mounted to the rigid body and a second sensor node mounted to the other rigid body;
• a transmission component having at least a first input node for receiving an input signal as well as an output node for providing an output signal representative of the distance;
• a frequency-dependent input signal generator operatively connected to the first sensor node of the capacitive sensor component and
• the first input node of the transmission component being operatively connected to the second sensor node of the capacitive sensor component.

A linear guideway assembly being composed of a rigid body formed as a linear guideway defining a linear displacement path as well as one or more rigid bodies formed as product carriers being displaceable along said linear guideway, wherein said linear guideway assembly further comprises:

• one or more magnetic bearing assemblies comprising:
• at least one first static back iron being mounted to the rigid body;
• and
• at least one magnetic bearing module being mounted to the other rigid body and consisting of at least:
• a ferromagnetic core;
• a first magnetic element positioned on a first side of the ferromagnetic core facing the first static back iron;
• a coil being wound around the ferromagnetic core;
• and
• one or more capacitive sensor devices for determining a distance between a rigid body and another rigid body in a system for contactless linear displacement along a linear displacement path of the rigid body relative to the other rigid body, the one or more capacitive sensor devices comprising:
• a capacitive sensor component with a first sensor node mounted to the rigid body and a second sensor node mounted to the other rigid body;
• a transmission component having at least a first input node for receiving an input signal as well as an output node for providing an output signal representative of the distance:
• a frequency-dependent input signal generator operatively connected to the first sensor node of the capacitive sensor component and
• the first input node of the transmission component being operatively connected to the second sensor node of the capacitive sensor component.