Fabrication process for flexible single-crystal perovskite devices
AssigneeThe Regents of the University of California
InventorsSheng Xu, Yusheng Lei, Yimu Chen
Life of this patent
Estimating the term…
Abstract
A method of fabricating an ionic crystal includes providing a single crystal substrate of an ionic crystal material is provided. A patterned mask is applied over the single crystal substrate A growth solution is introduced over the single crystal substrate. The growth solution includes precursors for epitaxial growth of the ionic crystal material on the single crystal substrate such that epitaxial crystals grow over time through pattern openings in the patterned mask into a crystal structure with one or more morphologies.
Claims16
A method of fabricating an ionic crystal, comprising:
- providing a single crystal substrate of an ionic crystal material;
- applying a patterned mask over the single crystal substrate;
- introducing a growth solution over the single crystal substrate, the growth solution including precursors for epitaxial growth of the ionic crystal material on the single crystal substrate such that epitaxial crystals grow over time through pattern openings in the patterned mask into a crystal structure with one or more morphologies;
- removing from the growth solution the patterned mask and the crystal structure grown on the substrate as an assembled unit;
- and
- detaching the single crystal substrate from the patterned mask and the crystal structure so that a subassembly of the patterned mask and the crystal structure remains;
- applying an antisolvent to a surface of the second substrate or a surface of the crystal structure prior to transferring and
- transferring the subassembly onto a second substrate.
A method of fabricating an ionic crystal, comprising:
- providing a single crystal substrate of an ionic crystal material;
- applying a patterned mask over the single crystal substrate;
- introducing a growth solution over the single crystal substrate, the growth solution including precursors for epitaxial growth of the ionic crystal material on the single crystal substrate such that epitaxial crystals grow over time through pattern openings in the patterned mask into a crystal structure with one or more morphologies;
- changing a concentration of the precursors in the growth solution while the crystal structure is growing to thereby form a compositionally graded crystal structure;
- and
- removing from the growth solution the patterned mask and the crystal structure grown on the substrate as an assembled unit.
A method of fabricating an ionic crystal, comprising:
- providing a single crystal substrate of an ionic crystal material;
- applying a patterned mask over the single crystal substrate, wherein the patterned mask is rigid;
- introducing a growth solution over the single crystal substrate, the growth solution including precursors for epitaxial growth of the ionic crystal material on the single crystal substrate such that epitaxial crystals grow over time through pattern openings in the patterned mask into a crystal structure with one or more morphologies;
- and
- removing from the growth solution the patterned mask and the crystal structure grown on the substrate as an assembled unit.
Dependencies are inferred from the claim text.