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US 12,406,866 B2Granted
Stamp tool, transfer device, and element array manufacturing method
AssigneeTDK Corporation
InventorsSeijiro Sunaga, Makoto Yamashita, Toshinobu Miyagoshi, Yasuo Kato, Tatsunori Otomo, Mitsuyoshi Makida, Yohei Sato
Life of this patent
Estimating the term…
Abstract
A stamp tool whose transport head can be easily shared, a transport device capable of allowing the stamp tool to easily pick up an transport object element disposed on a surface of a substrate from the substrate and transporting the element without being left on the substrate side, and an element array manufacturing method using the same.
Claims19
A stamp tool comprising:
- a stamp layer having a portion allowing a transport object element to detachably adhere thereto;
- a support plate, the stamp layer being fixed to the support plate;
- and
- an adapter plate replaceably attached to the support plate and having a mounting surface, a transport head being allowed to be detachably attached thereon.
1 more element
A transport device comprising:
- a stamp tool;
- and
- a transport head configured to detachably transport the stamp tool, wherein:
- the stamp tool includes:
- a stamp layer allowing a transport object element disposed on a substrate with a predetermined fixing force to adhere into the stamp layer with predetermined adhesion force;
- and
- an adapter plate configured to support the stamp layer, and having a mounting surface allowing the transport head to be detachably attached thereon,
- a mounting force to the mounting surface of the adapter plate by the transport head is greater than the fixing force,
- the adhesion force of the stamp layer to the transport object element is greater than the fixing force, and
- a tapered surface having an outer diameter decreasing toward the stamp layer is formed on a side surface of the adapter plate.
7 more elements
A transport device comprising:
- a stamp tool;
- and
- a transport head configured to detachably transport the stamp tool, wherein:
- the stamp tool includes:
- a stamp layer allowing a transport object element disposed on a substrate with a predetermined fixing force to adhere into the stamp layer with predetermined adhesion force;
- and
- an adapter plate configured to support the stamp layer, and having a mounting surface allowing the transport head to be detachably attached thereon,
- a mounting force to the mounting surface of the adapter plate by the transport head is greater than the fixing force,
- the adhesion force of the stamp layer to the transport object element is greater than the fixing force,
- the stamp tool further includes a support plate on which the stamp layer is fixed, and
- the adapter plate is replaceably attached to the support plate.
8 more elements
Dependencies are inferred from the claim text.