Device and method for operating a bending beam in a closed control loop
AssigneeCarl Zeiss SMT GmbH
InventorsChristof Baur, Florian Demski
Life of this patent
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Abstract
The present invention relates to a device for operating at least one bending beam in at least one closed control loop, wherein the device has: (a) at least one first interface designed to receive at least one controlled variable of the at least one control loop; (b) at least one programmable logic circuit designed to process a control error of the at least one control loop using a bit depth greater than the bit depth of the controlled variable; and (c) at least one second interface designed to provide a manipulated variable of the at least one control loop.
Claims17
An apparatus for operating at least one bending beam in at least one closed control loop, the apparatus comprising:
- a. at least one first interface designed to receive at least one controlled variable of the at least one control loop;
- b. at least one programmable logic circuit designed to process a control error of the at least one control loop using a bit depth that is greater than the bit depth of the controlled variable, the programmable logic circuit further being designed to switch over between at least one first operating mode and at least one second operating mode of the at least one bending beam;
- and
- c. at least one second interface designed to provide a manipulated variable of the at least one control loop.
A scanning probe microscope comprising:
- a. at least one bending beam configured to be operated in at least one first and at least one second operating mode, wherein the at least one bending beam comprises at least one measuring tip, and the at least one bending beam is configured to be operated in at least one closed control loop;
- b. at least one first interface designed to receive at least one controlled variable of the at least one control loop;
- c. at least one programmable logic circuit designed to process a control error of the at least one control loop using a bit depth that is greater than the bit depth of the controlled variable and to switch over between the at least one first operating mode and the at least one second operating mode of the at least one bending beam;
- and
- d. at least one second interface designed to provide a manipulated variable of the at least one control loop.
A method for operating at least one bending beam in at least one closed control loop, the method having the steps of:
- a. receiving at least one controlled variable of the at least one control loop;
- b. using at least one programmable logic circuit to process a control error of the at least one control loop using a bit depth that is greater than the bit depth of the controlled variable and to switch over between at least one first operating mode and at least one second operating mode of the at least one bending beam;
- and
- c. providing a manipulated variable of the at least one control loop.
Dependencies are inferred from the claim text.