Tweezers, conveyance device, and method for conveying sample piece

Tweezers configured to clamp a sample piece to be analyzed using a charged particle beam device, the tweezers comprising:

• a first clamping member;
• and
• a second clamping member, wherein
• the first clamping member includes a first clamping region and a first abutment region integrated with the first clamping region,
• the second clamping member includes a second clamping region and a second abutment region integrated with the second clamping region,
• the first clamping region includes a first surface for clamping the sample piece,
• the second clamping region includes a second surface that faces the first surface and is for clamping the sample piece,
• the first abutment region protrudes from the first clamping region in a direction directed from the first surface to the second surface,
• the second abutment region protrudes from the second clamping region in a direction directed from the second surface to the first surface,
• the first abutment region includes a third surface closer to the second clamping member than the first surface,
• the second abutment region includes a fourth surface that faces the third surface and is closer to the first clamping member than the second surface,
• the third surface and the fourth surface include a concave portion and a convex portion, respectively, and
• the third surface and the fourth surface face each other such that a concave portion of the third surface is fitted to a convex portion of the fourth surface and a convex portion of the third surface is fitted to a concave portion of the fourth surface.

Tweezers configured to clamp a sample piece to be analyzed using a charged particle beam device, the tweezers comprising:

• a first clamping member;
• and
• a second clamping member, wherein
• the first clamping member includes a first clamping region and a first abutment region integrated with the first clamping region,
• the second clamping member includes a second clamping region and a second abutment region integrated with the second clamping region,
• the first clamping region includes a first surface for clamping the sample piece,
• the second clamping region includes a second surface that faces the first surface and is for clamping the sample piece,
• the first abutment region protrudes from the first clamping region in a direction directed from the first surface to the second surface,
• the second abutment region protrudes from the second clamping region in a direction directed from the second surface to the first surface,
• the first abutment region includes a third surface closer to the second clamping member than the first surface, and a fifth surface that connects the third surface and the first surface,
• the second abutment region includes a fourth surface that faces the third surface and is closer to the first clamping member than the second surface, and a sixth surface that connects the fourth surface and the second surface,
• the first clamping region, the first abutment region, the second clamping region, and the second abutment region extend in a first direction, and
• the fifth surface and the sixth surface are inclined with respect to a surface perpendicular to the first direction.

A method for conveying a sample piece performed using a conveyance device including a stage for placing a sample, and tweezers including a first clamping member and a second clamping member, the method for conveying a sample piece comprising:

• (a) a step of placing the sample from which the sample piece is produced on a part of the stage;
• (b) a step of clamping the sample piece between the first clamping member and the second clamping member after the step (a);
• (c) a step of taking out the sample piece from the sample in a state where the sample piece is clamped by the tweezers after the step (b);
• and
• (d) a step of mounting the sample piece on a carrier for mounting the sample piece to be analyzed using a charged particle beam device in a state where the sample piece is clamped by the tweezers after the step (c),
• wherein during a period from a starting time of the step (c) to an ending time of the step (d), a state of the sample piece clamped between the first clamping member and the second clamping member changes from a first state to a second state because of sliding between the sample piece and the and second clamping members.

A method for conveying a sample piece performed using a conveyance device including a stage for placing a sample, and tweezers including a first clamping member and a second clamping member, the method for conveying a sample piece comprising:

• (a) a step of placing the sample from which the sample piece is produced on a part of the stage;
• (b) a step of clamping the sample piece between the first clamping member and the second clamping member after the step (a);
• (c) a step of taking out the sample piece from the sample in a state where the sample piece is clamped by the tweezers after the step (b);
• and
• (d) a step of mounting the sample piece on a carrier for mounting the sample piece to be analyzed using a charged particle beam device in a state where the sample piece is clamped by the tweezers after the step (c), wherein
• during a period from a starting time of the step (c) to an ending time of the step (d), a state of the sample piece clamped between the first clamping member and the second clamping member changes from a first state to a second state,
• the first clamping member includes a first clamping region and a first abutment region integrated with the first clamping region,
• the second clamping member includes a second clamping region and a second abutment region integrated with the second clamping region,
• the first clamping region includes a first surface for clamping the sample piece,
• the second clamping region includes a second surface that faces the first surface and is for clamping the sample piece,
• the first abutment region protrudes from the first clamping region in a direction directed from the first surface to the second surface,
• the second abutment region protrudes from the second clamping region in a direction directed from the second surface to the first surface,
• the sample piece includes a lower end portion and an upper end portion on a side opposite to the lower end portion,
• the lower end portion is positioned closer to a placement surface of the carrier than the upper end portion when the sample piece is mounted on the carrier,
• the upper end portion in the first state is separated from the first abutment region and the second abutment region, or is in contact with a part of each of the first abutment region and the second abutment region, and
• the upper end portion in the second state is in contact with the first abutment region and the second abutment region such that a contact area is larger than that in the first state.