3D profilometry with a Linnik interferometer
AssigneeKLA Corporation
InventorsAmnon Manassen, Yoav Grauer, Shlomo Eisenbach, Stephen Hiebert, Avner Safrani, Roel Gronheid
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Abstract
Systems and methods for generating volumetric data are disclosed. Such systems and methods may include scanning a sample at a plurality of focal planes located along a depth direction of the sample. Such systems and methods may include generating, via a detector of a metrology sub-system, a plurality of images of a volumetric field of view of the sample at the plurality of focal planes. Such systems and methods may include aggregating the plurality of images to generate volumetric data of the volumetric field of view of the sample. The metrology sub-system may include a Linnik interferometer.
Claims55
A metrology system comprising:
- a metrology sub-system comprising:
- a detector configured for multi-pixel imaging;
- an illumination source configured to generate an illumination beam;
- a beamsplitter configured to split the illumination beam into a measurement beam propagating in a measurement arm and a reference beam propagating in a reference arm, wherein the illumination beam includes a first spectral range of illumination partially overlapping a second spectral range of illumination, wherein the beamsplitter includes a wavelength filter beamsplitter such that the reference beam includes the first spectral range of illumination and the measurement beam includes the second spectral range of illumination;
- a measurement objective lens configured to direct the measurement beam to a sample;
- one or more illumination optics configured to illuminate a volumetric field of view of the sample with the measurement beam through the measurement objective lens;
- and
- a reference objective lens configured to direct the reference beam to a reference sample;
- and
- wherein the metrology sub-system is configured to, according to a metrology recipe, image the volumetric field of view of the sample on the detector based on interference of the measurement beam with the reference beam,
- a controller communicatively coupled to the detector, wherein the controller includes one or more processors configured to execute program instructions causing the one or more processors to:
- receive a plurality of images from a scan of the sample at a plurality of focal planes located along a depth direction of the sample to generate, via the detector of the metrology sub-system, the plurality of images of the volumetric field of view of the sample at the plurality of focal planes;
- and
- aggregate the plurality of images to generate volumetric data of the volumetric field of view of the sample.
A method comprising:
- scanning a sample at a plurality of focal planes located along a depth direction of the sample to generate, via a detector of a metrology sub-system, a plurality of images of a volumetric field of view of the sample at the plurality of focal planes, wherein the detector comprises a multi-pixel detector;
- and
- aggregating the plurality of images to generate volumetric data of the volumetric field of view of the sample,
- the metrology sub-system comprising a Linnik interferometer, wherein metrology sub-system is configured to generate an illumination beam including a first spectral range of illumination partially overlapping a second spectral range of illumination, wherein a beamsplitter includes a wavelength filter beamsplitter such that the reference beam includes the first spectral range of illumination and the measurement beam includes the second spectral range of illumination.
Dependencies are inferred from the claim text.