Loading patent…
AssigneeFraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
InventorsBert Scheffel, Matthias Tenbusch, Stefan Saager
Estimating the term…
An apparatus and method for depositing a carbon layer includes an arc discharge is formed between an electron source and an evaporation material by means of a first power supply device. The negative terminal of the first power supply device is connected in an electrically conducting manner to the electron source and the positive terminal of the first power supply device is connected in an electrically conducting manner to the evaporation material. A permanent magnet system and a solenoid coil are arranged in a rotationally symmetrical manner around the evaporation material. The evaporation material is formed as a graphite rod which is surrounded by at least one heat-insulating element at least on the rod end to be evaporated of the graphite rod.
An apparatus for depositing a carbon layer on a substrate to be coated, comprising:
A method for depositing a carbon layer on a substrate to be coated, the method comprising:
Dependencies are inferred from the claim text.