Electron spectroscopy based techniques for determining various chemical and electrical characteristics of samples

A measurement system for measuring a sample, the measurement system comprising:

• an excitation system comprising a plurality of excitation sources generating excitations of different types comprising:
• a high energy radiation source generating high energy radiation and at least one of the following:
• at least one relatively low-energy particles' source generating at least one wide beam;
• at least one electron beam source generating e-radiation in the form of a focused electron beam;
• a light source generating illumination including one or more optical beams;
• and at least one electric power supply providing a bias voltage to a sample;
• a signal modulation system associated with at least two of said excitation sources, thereby providing that each of at least two respective excitations is a modulated excitation having a predetermined modulation profile during each of at least one measurement session, such that the excitations of the different types including the at least two modulated excitations, when concurrently applied to at least a region of the sample, differently affect said at least region of the sample inducing responses of the sample including responses to the different modulated excitations indicative of various different information pieces about the sample, forming together a combined effective response of the sample embedding multiple data about the sample;
• a detection system comprising at least an electron spectrometer and being configured and operable for detecting the effective response of said at least region of the sample to the multiple excitations including said at least two modulated excitations and generating measured data indicative of the detected effective response, which is indicative of a modulated change of electrical state of at least said region of the sample;
• a control unit configured for signal communication with the detector to process the measured data, utilizing modulation data about the predetermined modulation profile for each of said at least two modulated excitations, and determine one or more of the parameters/conditions of said at least region of the sample.