Electromagnetic actuator
AssigneePhysik Instrumente (Pi) GmbH & Co. KG
InventorsChristian Rudolf, Bradley Engel
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Abstract
An electromagnetic actuator comprises two units, which, upon electromagnetic interaction, are configured to cause a guided movement relative to each other in translational and rotational directions with a bearing gap in between. The electromagnetic actuator is configured to supply compressed gas to the bearing gap to create a film of gas between the units constituting a frictionless floating bearing.
Claims19
An electromagnetic actuator comprising two units, which, upon electromagnetic interaction, are configured to cause a guide movement relative to each other in a translational direction and to cause or allow a guide movement relative to each other in a rotational direction, around the translational direction, with a bearing gap in between, wherein the electromagnetic actuator is configured to supply pressurized gas to the bearing gap to create a film of gas constituting a frictionless floating bearing between the two units, wherein a predefined angular range of the movement in the rotational direction of the two units relative to each other is between 10 to 350 degrees.
Dependencies are inferred from the claim text.