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US 12,286,704 B2Granted
Thermal evaporation sources for wide-area deposition
AssigneeJLN Solar, Inc.
InventorsRobert W. Birkmire, Gregory M. Hanket
Life of this patent
Estimating the term…
Abstract
A thermal evaporation sources are described. These thermal evaporation sources include a crucible configured to contain a volume of evaporant and a vapor space above the evaporant.
Claims20
A thermal evaporation source comprising:
- a crucible configured to contain a volume of evaporant and a vapor space above the evaporant;
- and
- a manifold body,
- wherein the manifold body comprises an expansion chamber that is flowably connected to the vapor space via one or more restriction orifices located on the crucible,
- wherein the crucible is located inside the expansion chamber and centered in the expansion chamber,
- wherein the crucible is circular in cross-section and includes a bottom, a side wall, a top rim, and a side wall extension that extends above the top rim to a ceiling of the manifold body to form an annulus with inside walls of the manifold body and to form one or more restriction orifices, and
- wherein the one or more restriction orifices comprise at least three orifices evenly spaced on the side wall extension.
4 more elements
A thermal evaporation source comprising:
- a manifold body including an expansion chamber, a nozzle, a top internal surface, and a general sloping shape narrowing from the expansion chamber toward the nozzle;
- a crucible having a circumference configured to contain a volume of evaporant,
- wherein mechanical members suspend the crucible from the top internal surface and thereby form at least one restriction orifice,
- wherein the expansion chamber is a space between the crucible and the manifold body,
- wherein the at least one restriction orifice comprises at least three orifices evenly spaced around the circumference of the crucible, and
- wherein each of the at least three orifices is at a same distance from the top internal surface of the manifold.
3 more elements
Dependencies are inferred from the claim text.