Method of manufacturing a micro-fluid probe

A method of manufacturing a micro-fluidic probe,

• wherein an intermediate product is subjected to a plurality of method steps, the intermediate product:
• defining a first side and a second side, and
• comprises a base substrate, said base substrate comprising a base material, wherein at the first side the surface of the base substrate defines a main plane;
• wherein the plurality of method steps comprises the steps of:
• providing the base substrate of the intermediate product at the first side with a plurality of pyramidal pits in said base material, a pyramidal pit comprising i) a first pyramidal side at an angle α to the main plane and ii) further pyramidal planes,
• providing the base substrate with a layer of first material at the first side of the intermediate product, the first material being different from the base material so as to result in the intermediate product having pits comprising a layer of said first material,
• in arbitrary order
• directionally depositing a second layer of a second material different from the first material, said second material being a material capable of being deposited directionally and said directional depositing being performed in a first direction relatively parallel with the first pyramidal side so as to deposit said second layer on the further pyramidal sides wherein said second layer on each of the further pyramidal sides is thicker than the thickness of any second material deposited on the first pyramidal side, and
• directionally depositing a third layer of a third material different from the first material, on the first side, said third material being a material capable of being deposited directionally and said directional depositing being performed in a second direction, said second direction
• being relatively transverse to the first pyramidal side at an angle β to the main plane, said angle β having an absolute value smaller than the absolute value of α, and
• having a vectorial component parallel to the main surface that is opposite to the vectorial component parallel to the main surface of 11 the first direction;
• so as to deposit said third layer on a top section of the first pyramidal side while an edge of the pyramidal pit serves as a shadow mask so as to shield a bottom section of the first pyramidal side from being covered with said third material;
• and
• etching the exposed parts of the layer of said first material using the second layer of second material and the third layer of third material;
• as a masking layer to provide a through-hole in the layer of first material.