Nanoimprint lithography template with peripheral pockets, system of using the template, and method of using the template
AssigneeCanon Kabushiki Kaisha
InventorAnshuman Cherala
Life of this patent
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Abstract
A nanoimprint lithography template, a system for using the template and a method of using the template. The template may comprise a body having a front side with a shaping surface. The back side may have a central core-out that is located opposite the shaping surface. A first peripheral region may be bounded by: the central core-out; a first edge of the template; and a first set of two parallel perimeter lines orthogonal to the first edge and extending from the first edge to the central core-out. A first peripheral core-out may be positioned in the first peripheral region.
Claims20
A nanoimprint lithography template comprising:
- a body having a front side with a shaping surface, and
- a back side having a central core-out that is located opposite the shaping surface;
- a first peripheral region bounded by:
- the central core-out;
- a first edge of the template;
- and
- a first set of two parallel perimeter lines orthogonal to the first edge and extending from the first edge to the central core-out;
- and
- a first peripheral pocket positioned in the first peripheral region.
A method of manufacturing an article comprising:
- holding a template with a nanoimprint lithography template;
- wherein the nanoimprint lithography template comprises:
- a body having a front side with a shaping surface, and
- a back side having a central core-out that is located opposite the shaping surface;
- a first peripheral region bounded by:
- the central core-out;
- a first edge of the template;
- and
- a first set of two parallel perimeter lines orthogonal to the first edge and extending from the first edge to the central core-out;
- and
- a first peripheral pocket positioned in the first peripheral region;
- shaping formable material on a substrate with the nanoimprint lithography template;
- curing the formable material between the template and the substrate to form a shaped film;
- and
- processing the shaped film on the substrate so as to create the article of manufacture.
Dependencies are inferred from the claim text.