Assembly for replicating flexible stamps from a master
AssigneeMorphotonics Holding B.V.
InventorsLeon Willem Veldhuizen, Jan Matthijs Ter Meulen, Bram Johannes Titulaer
Life of this patent
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Abstract
An assembly includes a master for imprinting of micro-structures and nano-structures. The master has on its upper surface an active area with relief structure for imprinting of the micro-structures and nano-structures, and the master has a thickness dmaster. The assembly includes frame pieces arranged around and flushing along the outer circumference of the master, with the frame pieces having a thickness dframe. The thickness dframe of the frame pieces deviates from the thickness dmaster of the master by at most 250 μm. A a flexible stamp has improved alignment.
Claims14
An assembly comprising:
- a master for imprinting of micro-structures and nano-structures, the master being arranged on a substrate carrier and having on an upper surface an active area with relief structure for imprinting of the micro-structures and nano-structures, the master having a thickness dmaster:
- a set of frame pieces mounted on the substrate carrier, wherein a length of each frame piece is longer than a length of an adjacent edge of the master, and wherein all of the frame pieces are arranged around and flush along an outer circumference of the master and are shaped and oriented so that two neighboring edges of each frame piece form an extrapolation of two neighboring edges of the master, the frame pieces having a thickness dframe, wherein the thickness dframe of the frame pieces deviates from the thickness dmaster of the master by at most 250 μm.
The assembly according to claim, 1, wherein the frame pieces have an optically detectable relief structure on a surface being directed in a same direction as the upper surface of the master.
An assembly comprising:
- a master for imprinting of micro-structures and nano-structures, the master being arranged on a substrate carrier and having on an upper surface an active area with relief structure for imprinting of the micro-structures and nano-structures, the master having a thickness dmaster:
- a set of frame pieces mounted on the substrate carrier and arranged around and being flush along an outer circumference of the master, the frame pieces having a thickness dframe, wherein the thickness dframe of the frame pieces deviates from the thickness dmaster of the master by at most 250 μm;
- wherein the outer circumference of the master has a non-quadratic and non-rectangular contour and the frame pieces arranged around the outer circumference of the master are shaped and arranged such that edges adjoining the master are adapted in shape and size to follow the contour of the circumference of the master while the frame pieces with outer edges form a square or rectangle.
A method of using frame pieces in an imprint process for manufacturing a flexible stamp, comprising:
- replicating the flexible stamp from a master having on an upper surface an active area with relief structure for imprinting of micro-structures and nano-structures, wherein the master has a thickness dmaster;
- arranging the frame pieces around an outer circumference of the master and positioning the frame pieces flush with the outer circumference of the master;
- wherein a length of each frame piece is longer than a length of an adjacent edge of the master and wherein all of the frame pieces are arranged around and flush along the outer circumference of the master, and wherein all of the frame pieces are shaped and oriented so that two neighboring edges of each frame piece form an extrapolation of two neighboring edges of the master;
- wherein the frame pieces have a thickness dframe, wherein the thickness dframe of the frame pieces deviates from the thickness dmaster of the master by at most 250 μm and wherein master and frame pieces are mounted on a substrate carrier and are distinct from the substrate carrier;
- imprinting with the active area of the master.
Dependencies are inferred from the claim text.