US 12,228,427 B2 · Resistive differential alignment monitor

Abstract

A microelectronic device includes a resistive differential alignment monitor (RDAM), including a first variable-width resistor and a second variable-width resistor, which are members of a conductor level. Each of the resistors include a wide portion and a narrow portion. The RDAM further includes a vertical connector to each of the wide portion and the narrow portion of the first variable-width resistor, and to the wide portion and the narrow portion of the second variable-width resistor. The vertical connectors are members of a vertical connector level. Test terminals are coupled to the vertical connectors. The vertical connectors to the first variable-width resistor and the vertical connectors to the second variable-width resistor are separated by equal distances and are oriented anti-parallel to each other. The RDAM may be used to estimate a misalignment distance between the members of the vertical connector level and the members of the conductor level.

Claims28

Dependent claims

A microelectronic device, comprising:

a resistive differential alignment monitor (RDAM), including:
a first resistor, including a first wide portion and a first narrow portion;
a first connector contacting the first wide portion;
a second connector contacting the first narrow portion;
a second resistor, including a second wide portion and a second narrow portion;
a third connector contacting the second wide portion;
and
a fourth connector contacting the second narrow portion;
wherein:
a first width of the first wide portion adjacent to the first connector is greater than a second width of the first narrow portion adjacent to the second connector;
the first connector is separated from the second connector in a first direction by a first length;
the second wide portion adjacent to the third connector has the first width;
the second narrow portion adjacent to the fourth connector has the second width;
and
the third connector is separated from the fourth connector in a second direction, anti-parallel to the first direction, by the first length.

12 more elements

Dependencies are inferred from the claim text.

Resistive differential alignment monitor

Life of this patent

Resistive differential alignment monitor

Life of this patent

Abstract

Claims28