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US 12,225,735 B2Granted
Selector for memory device
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsHung-Ju Li, Kuo-Pin Chang, Yu-Wei Ting, Ching-En Chen, Kuo-Ching Huang
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Abstract
A memory device is provided in various embodiments. The memory device, in those embodiments, has an ovonic threshold switching (OTS) selector comprising multiple layers of OTS materials to achieve a low leakage current and as well as relatively low threshold voltage for the OTS selector. The multiple layers can have at least one layer of low bandgap OTS material and at least one layer of high bandgap OTS material.
Claims20
A memory device comprising:
- a first metallic layer;
- a first low bandgap ovonic threshold switching (OTS) layer disposed in direct contact with the first metallic layer;
- a high bandgap OTS layer disposed adjacent to the first low bandgap OTS layer and in direct contact with the first low bandgap OTS layer;
- a second low bandgap OTS layer disposed adjacent to the high bandgap OTS layer and in direct contact with the high bandgap OTS layer;
- and
- a second metallic layer disposed adjacent to the second low bandgap OTS layer and in direct contact with the second low bandgap OTS layer;
- and, wherein the first metallic layer, the first low bandgap OTS layer, the high bandgap OTS layer, the second low bandgap OTS layer and the second metallic layer forming a phase change element arranged to have a threshold voltage to operate with a corresponding leakage current.
4 more elements
A method for forming a memory device, the method comprising:
- forming a first metallic layer;
- disposing a first low bandgap ovonic threshold switching (OTS) layer in direct contact with the first metallic layer;
- disposing a high bandgap OTS layer disposed adjacent to the first low bandgap OTS layer in direct contact with the first low bandgap OTS layer;
- disposing a second low bandgap OTS layer adjacent to the high bandgap OTS layer in direct contact with the high bandgap OTS layer;
- and
- disposing a second metallic layer adjacent to the second low bandgap OTS layer in direct contact with the second low bandgap OTS layer;
- and, wherein the first metallic layer, the first low bandgap OTS layer, the high bandgap OTS layer, the second low bandgap OTS layer and the second metallic layer forming a phase change element arranged to have a threshold voltage to operate with a corresponding leakage current.
4 more elements
A memory array comprising:
- bit lines including a first bit line, word lines including a first word line, and memory devices including a first memory device, wherein the first memory device is located at an intersection of the first bit line intersecting the first world line, and wherein the first memory device comprises a phase change memory connected to an ovonic threshold switching (OTS) selector, wherein the OTS selector comprises:
- a first metallic layer;
- a first low bandgap OTS layer disposed in direct contact with the first metallic layer;
- a high bandgap OTS layer disposed adjacent to the first low bandgap OTS layer and in direct contact with the first low bandgap OTS layer;
- a second low bandgap OTS layer disposed adjacent to the high bandgap OTS layer and in direct contact with the high bandgap OTS layer;
- and
- a second metallic layer disposed adjacent to the second low bandgap OTS layer and in direct contact with the second low bandgap OTS layer;
- and, wherein the first metallic layer, the first low bandgap OTS layer, the high bandgap OTS layer, the second low bandgap OTS layer and the second metallic layer forming a phase change element arranged to have a threshold voltage to operate with a corresponding leakage current.
5 more elements
Dependencies are inferred from the claim text.