Semiconductor device having semiconductor layers disposed between upper portions of the isolation structures and the active regions

Abstract

A semiconductor device includes a substrate, a plurality of active regions disposed in the substrate and respectively extending along a first direction and arranged into an array, and a plurality of isolation structures disposed in the substrate between the active regions. The isolation structures respectively comprise an upper portion and a lower portion, wherein a sidewall of the upper portion comprises a first slope, a sidewall of the lower portion comprises a second slop, and the first slope and the second slope are different. The semiconductor device further includes a plurality of semiconductor layers disposed between the upper portions of the isolation structures and the active regions.

Dependencies are inferred from the claim text.