Substrate heating apparatus and method for processing a substrate

A substrate processing method comprising:

• providing a substrate onto a substrate heating apparatus comprised in a substrate processing apparatus, the substrate heating apparatus including:
• a plurality of heating lamps,
• a window including a window base and a central lens disposed in at least one of an upper surface or a lower surface of a central portion of the window base, wherein the window supports the substrate above the plurality of heating lamps and wherein the central lens is spaced apart from the substrate, and
• a mirror disposed below the plurality of heating lamps, the mirror including a mirror base, a central reflector disposed on the mirror base, and an edge reflector disposed on an edge portion of the mirror base;
• supplying a processing solution onto the substrate by a solution supply assembly comprised in the substrate processing apparatus;
• and
• heating the substrate, wherein the heating the substrate comprises:
• emitting first light via the plurality of heating lamps onto the substrate through the window,
• emitting second light via the plurality of heating lamps onto the mirror,
• reflecting the second light via the mirror through the window onto the substrate, including reflecting a central portion of the second light via the central reflector through the window onto a central portion of the substrate and reflecting an edge portion of the second light via the edge reflector through the window onto an edge portion of the substrate, and
• focusing a first portion of the first light and a first portion of the second light via the central lens onto the central portion of the substrate.

A substrate heating apparatus comprising:

• a support shaft extending in a first direction;
• a chuck stage disposed on and coupled to the support shaft;
• a plurality of heating lamps disposed on the chuck stage;
• and
• a window disposed on the chuck stage, the window including a window base and a central lens disposed in a surface of the window base, wherein the central lens at least partially overlaps the support shaft in the first direction and wherein the chuck stage and the window are each configured to support a substrate above the plurality of heating lamps,
• wherein the plurality of heating lamps are configured to heat the substrate by emitting light through the window onto the substrate, and
• wherein the central lens is configured to focus a portion of the light onto the central portion of the substrate.