Manufacturing method of a composite substrate of an acoustic wave resonator

Abstract

The present invention discloses a composite substrate for manufacturing an acoustic wave resonator and a Surface Acoustic Wave (SAW) resonator, and a manufacturing method thereof. The manufacturing method of the composite substrate includes: providing a base, wherein the base includes a first surface and a second surface that are opposite to each other; and a first groove sunken towards the second surface is formed on the first surface; and providing a piezoelectric plate, wherein the piezoelectric plate is matched with the first groove in shape, and a bottom of the first groove is integrated with the piezoelectric plate by bonding; and the composite substrate includes: a base, wherein the base includes a first surface and a second surface that are opposite to each other; and a first groove sunken towards the second surface is provided on the first surface; and a piezoelectric plate, wherein the piezoelectric plate is embedded into the first groove, and a top of the piezoelectric plate is higher than the first surface or flush with the first surface.

Dependencies are inferred from the claim text.