Line narrowing module, gas laser apparatus, and method for manufacturing electronic devices
AssigneeGigaphoton Inc.
InventorsJunichi Maekawa, Hiroshi Furusato
Life of this patent
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Abstract
A line narrowing module includes an enclosure, a prism which is disposed in an internal space of the enclosure and through which light passes, a mounter which is disposed in the internal space and on which the prism is mounted, a fixing unit which is disposed in the internal space and fixes the prism to the mounter, and a light blocking member. The light blocking member is disposed in the internal space and blocks scattered light in the internal space, the scattered light produced from the light and traveling to the fixing unit.
Claims16
A line narrowing module comprising:
- an enclosure;
- a prism which is disposed in an internal space of the enclosure and through which light passes;
- a mounter which is disposed in the internal space and on which the prism is mounted;
- a fixing unit which is disposed in the internal space and fixes the prism to the mounter;
- and
- a light blocking member which is disposed in the internal space and blocks scattered light in the internal space, the scattered light produced from the light and traveling to the fixing unit.
A gas laser apparatus comprising a line narrowing module,
- the line narrowing module includes
- an enclosure,
- a prism which is disposed in an internal space of the enclosure and through which light passes,
- a mounter which is disposed in the internal space and on which the prism is mounted,
- a fixing unit which is disposed in the internal space and fixes the prism to the mounter, and
- a light blocking member which is disposed in the internal space and blocks scattered light in the internal space, the scattered light produced from the light and traveling to the fixing unit.
An electronic device manufacturing method comprising:
- causing laser light outputted from a gas laser apparatus including a line narrowing module to enter an exposure apparatus,
- the line narrowing module including
- an enclosure,
- a prism which is disposed in an internal space of the enclosure and through which light passes,
- a mounter which is disposed in the internal space and on which the prism is mounted,
- a fixing unit which is disposed in the internal space and fixes the prism to the mounter, and
- a light blocking member which is disposed in the internal space and blocks scattered light in the internal space, the scattered light produced from the light and traveling to the fixing unit, and
- causing a light sensitive substrate to be exposed to the laser light in the exposure apparatus to manufacture electronic devices.
Dependencies are inferred from the claim text.