Back to results
US 12,224,362 B2Granted
Substrates having a broadband antireflection layer and methods of forming a broadband antireflection layer
AssigneeUniversity of Florida Research Foundation, Inc.
InventorsPeng Jiang, Zhuxiao Gu, Ruwen Tan
Life of this patent
Estimating the term…
Abstract
Embodiments of the present disclosure provide for methods of making substrates having an (AR) antireflective layer, substrates having an antireflective layer, devices including a substrate having an antireflective layer, and the like. The AR layer can have a total specular reflection of less than 10% at a wavelength of about 400-800 nm, and a height of about 500-1000 nm.
Claims5
A structure comprising:
- a base substrate having a polyimide substrate disposed over a first area of the base substrate and second area having a broadband antireflective layer that has a total specular reflection of less than 10% at a wavelength of about 400 to about 800 nm, wherein the broadband antireflective layer has a plurality of pillars that are not uniformly and are randomly spaced apart from one another, wherein the plurality of pillars are non-uniformly sized, wherein the broadband antireflective layer has a height of about 500 nm to about 1000 nm, wherein the plurality of pillars that have a spacing of about 10 nm to 300 nm between a pair of pillars as measured from pillar base to pillar base, and at least one pillar has a diameter at the base of about 50 to 300 nm.
Dependencies are inferred from the claim text.