Single-crystal transistors for memory devices
AssigneeMicron Technology, Inc.
InventorsFatma Arzum Simsek-Ege, Masihhur R. Laskar, Nicholas R. Tapias, Darwin Franseda Fan, Manuj Nahar
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AssigneeMicron Technology, Inc.
InventorsFatma Arzum Simsek-Ege, Masihhur R. Laskar, Nicholas R. Tapias, Darwin Franseda Fan, Manuj Nahar
Estimating the term…
Methods, systems, and devices for single-crystal transistors for memory devices are described. In some examples, a cavity may be formed through at least a portion of one or more dielectric materials, which may be deposited above a deck of memory cells. The cavity may include a taper, such as a taper toward a point, or a taper having an included angle that is within a range, or a taper from a cross-sectional area to some fraction of the cross-sectional area, among other examples. A semiconductor material may be deposited in the cavity and above the one or more dielectric materials, and formed in a single crystalline arrangement based on heating and cooling the deposited semiconductor material. One or more portions of a transistor, such as a channel portion of a transistor, may be formed at least in part by doping the single crystalline arrangement of the semiconductor material.
An apparatus, comprising:
An apparatus, comprising:
A transistor formed by a process of:
Dependencies are inferred from the claim text.