Image sensor including a pixel separation structure
AssigneeSamsung Electronics Co., Ltd.
InventorsHongki Kim, Changrok Moon, Taehyong Kim, Seungjae Oh, Jihyun Kwak
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AssigneeSamsung Electronics Co., Ltd.
InventorsHongki Kim, Changrok Moon, Taehyong Kim, Seungjae Oh, Jihyun Kwak
Estimating the term…
An image sensor includes: a semiconductor substrate that has a first surface and a second surface opposite to each other. The semiconductor substrate includes: a first trench that vertically extends from the first surface of the semiconductor substrate and provides a pixel region, and a second trench that vertically extends from the first surface of the semiconductor substrate and is disposed on the pixel region. The image sensor further includes: a pixel separation structure that vertically extends from the second surface of the semiconductor substrate and overlaps the first trench; and a gap-fill dielectric layer disposed on the first surface of the semiconductor substrate, wherein the gap-fill dielectric layer includes a pixel separation part and a scattering pattern part, wherein the pixel separation part is disposed in the first trench, and the scattering pattern part is disposed in the second trench.
An image sensor, comprising:
An image sensor, comprising:
An image sensor, comprising:
Dependencies are inferred from the claim text.