Interdigitated device stack
AssigneeTokyo Electron Limited
InventorsLars Liebmann, Jeffrey Smith, Daniel Chanemougame, Paul Gutwin, Brian Cline, Xiaoqing Xu, David Pietromonaco
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AssigneeTokyo Electron Limited
InventorsLars Liebmann, Jeffrey Smith, Daniel Chanemougame, Paul Gutwin, Brian Cline, Xiaoqing Xu, David Pietromonaco
Estimating the term…
A semiconductor device includes a first pair of transistors over a substrate. The first pair of transistors includes a first transistor having a first gate structure over the substrate and a second transistor having a second gate structure stacked over the first transistor. A second pair of transistors is stacked over the first pair of transistors, resulting in a vertical stack perpendicular to a working surface of the substrate. The second pair of transistors includes a third transistor having a third gate structure stacked over the second transistor and a fourth transistor having a fourth gate structure stacked over the third transistor. The third gate structure extends from a central region of the vertical stack to a first side of the vertical stack. The second gate structure and the fourth gate structure extend from the central region to a second side of the vertical stack opposite the first side.
A semiconductor device, comprising:
A semiconductor device, comprising:
A semiconductor device, comprising:
Dependencies are inferred from the claim text.