Method of processing a workpiece and system for processing a workpiece

A system for processing a workpiece having a first surface, a second surface opposite the first surface, and a third surface extending between the first and second surfaces, the system comprising:

• a modified region forming means configured to form modified regions inside the workpiece so as to create openings in the workpiece, the openings extending from the modified regions through non-modified regions of the workpiece to at least one of the first surface, the second surface and the third surface, the modified regions being formed so as to be arranged entirely inside the workpiece, so that the modified regions do not extend to any one of the first surface, the second surface and the third surface;
• a liquid medium supplying means configured to introduce a liquid medium into at least some of the openings, wherein the liquid medium is contained by a liquid barrier that surrounds the workpiece;
• and
• an external stimulus applying means configured to apply an external stimulus to the liquid medium introduced into the at least some of the openings so as to increase the volume of the medium,
• wherein the workpiece is divided when the external stimulus is applied to the liquid medium, without an additional dividing step, and
• wherein:
• the workpiece is supported by a sheeting;
• and
• the liquid barrier is provided on an upper surface of the sheeting.

A method of processing a workpiece having a first surface, a second surface opposite the first surface, and a third surface extending between the first and second surfaces, the method comprising:

• forming a plurality of hole regions in the workpiece, wherein each hole region is composed of a modified region and an opening in the modified region, wherein the modified region surrounds the opening, wherein the opening extends to at least one of the first surface, the second surface and the third surface, and further wherein each modified region comprises or is an amorphous region;
• after forming the hole regions in the workpiece, introducing a liquid medium into at least some of the openings, wherein the liquid medium is contained by a liquid barrier that surrounds the workpiece;
• and
• after introducing the liquid medium into the at least some of the openings, applying an external stimulus to the liquid medium so as to increase the volume of the medium, and
• wherein:
• the workpiece is supported by a sheeting;
• and
• the liquid barrier is provided on an upper surface of the sheeting.

A system for processing a workpiece having a first surface, a second surface opposite the first surface, and a third surface extending between the first and second surfaces, the system comprising:

• a modified region forming means configured to form hole regions in the workpiece, wherein each hole region is composed of a modified region and an opening in the modified region, wherein the modified region surrounds the opening, wherein the opening extends to at least one of the first surface, the second surface and the third surface, and further wherein each modified region comprises or is an amorphous region;
• a liquid medium supplying means configured to introduce a liquid medium into at least some of the openings, wherein the liquid medium is contained by a liquid barrier that surrounds the workpiece;
• and
• an external stimulus applying means configured to apply an external stimulus to the liquid medium introduced into the at least some of the openings so as to increase the volume of the medium, and
• wherein:
• the workpiece is supported by a sheeting;
• and
• the liquid barrier is provided on an upper surface of the sheeting.