Centering wafer for processing chamber

A centering wafer comprising:

• a disc-shaped body having a top surface and a bottom surface defining a thickness, a center and an outer edge having an outer peripheral face;
• and
• a plurality of arc-shaped slits extending through the thickness of the disc-shaped body, the plurality of arc-shaped slits including a first arc-shaped slit and a second arc-shaped slit, the first arc-shaped slit having a first width defined by an inner edge and an outer edge, the inner edge having an inner face spaced a first distance from the center of the disc-shaped body and shaped concentric to the disc-shaped body, the outer edge having an outer face spaced a second distance from the center of the disc-shaped body and shaped concentric to the disc-shaped body, the second distance being greater than the first distance, the first arc-shaped slit having a first length defined by a first end and a second end, the first end having a first end face, the second end having a second end face, each of the first end and second end located at different angular orientations relative to the center of the disc-shaped body, the first arc-shaped slit spaced a first distance from the outer peripheral face, and
• the second arc-shaped slit having a second width defined by an inner edge and an outer edge, the inner edge having an inner face spaced a first distance from the center of the disc-shaped body and shaped concentric to the disc-shaped body, the outer edge having an outer face spaced a second distance from the center of the disc-shaped body and shaped concentric to the disc-shaped body, the second distance being greater than the first distance, the second arc-shaped slit having a second length defined by a first end and a second end, the first end having a first end face, the second end having a second end face, each of the first end and second end located at different angular orientations relative to the center of the disc-shaped body, the second arc-shaped slit spaced a second distance from the outer peripheral face, the second arc-shaped slit centered angularly a distance from the first arc-shaped slit greater than the larger of the first width or second width, the first arc-shaped slit and the second arc-shaped slit on opposite sides of the disc-shaped body, wherein the disc-shaped body does not include any other slits other than the first arc-shaped slit and the second arc-shaped slit.