Control method and substrate transfer system

A transfer system comprising:

• a transfer mechanism for transferring a substrate and having a holder for holding the substrate;
• a measurer for detecting an outer edge of the substrate transferred by the transfer mechanism and measuring a center position of the substrate;
• and
• a controller for controlling the transfer mechanism,
• wherein the measurer measures the center position of the substrate by:
• acquiring a position information of the measurer with respect to the transfer mechanism as a calibration data in a state where the substrate is held by the holder such that a reference position of the holder and the center position of the substrate coincide with each other;
• storing the calibration data for each transfer path as a preset adjustment value;
• and calculating the center position of the substrate using the preset adjustment value corresponding to the path for transferring the substrate, and
• the controller corrects a target position based on the reference position of the holder and an amount of displacement between the center position of the substrate and the reference position of the holder, and controls the transfer mechanism such that the reference position of the holder becomes the corrected target position.

A substrate transfer system comprising:

• a transfer mechanism for transferring a substrate and having a holder for holding the substrate;
• a measurer for detecting an outer edge of the substrate transferred by the transfer mechanism and measuring a center position of the substrate;
• and
• a controller for controlling the transfer mechanism,
• wherein the holder has a protruding portion that protrudes from the substrate held by the holder, and
• the controller causes the measurer to measure the center position of the substrate by:
• acquiring a position information of the measurer with respect to the transfer mechanism as a calibration data in a state where the substrate is held by the holder such that a reference position of the holder and the center position of the substrate coincide with each other;
• storing the calibration data for each transfer path as a preset adjustment value;
• and calculating the center position of the substrate using the preset adjustment value corresponding to the path for transferring the substrate, corrects a target position based on the center position of the substrate and the reference position of the holder, and controls the transfer mechanism such that the reference position of the holder becomes the corrected target position.