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US 12,224,189 B2Granted
Substrate type sensor and method of measuring the impact point and the impact force of chemical
AssigneeSemes Co., Ltd.
InventorsYoung Seop Choi, Yong-Jun Seo, Sang Hyun Son, Jun Gwon Lee, Hak Hyon Kim, Sun Yong Park
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Abstract
A substrate type sensor includes a substrate shape member, a pressure sensor panel provided at the substrate shape member, the pressure sensor panel including a plurality of pressure sensors, a central module including a transmission unit, the reception unit receiving data from the pressure sensor panel, and a battery proving power to the pressure sensor panel and the central module.
Claims9
A substrate type sensor comprising:
- a substrate shape member;
- a pressure sensor panel provided at the substrate shape member, the pressure sensor panel including a plurality of pressure sensors;
- a central module including a reception unit, the reception unit being configured to receive data from the pressure sensor panel;
- and
- a battery configured to provide power to the pressure sensor panel and the central module;
- wherein the pressure sensor panel comprises:
- a front pressure sensor panel provided at a front of the substrate shape member;
- and
- a back pressure sensor panel provided at a back of the substrate shape member.
6 more elements
A treating apparatus for treating a substrate with a chemical liquid comprises:
- a support unit for supporting the substrate;
- a nozzle for discharging a first liquid chemical to a top surface of the substrate disposed on the support unit;
- a back nozzle for discharging a second liquid chemical to a bottom surface of the substrate disposed on the support unit;
- and
- a substrate type sensor placed at a location where the substrate is to be placed and comprising:
- a substrate shape member;
- a pressure sensor panel provided at the substrate shape member, the pressure sensor panel including a plurality of pressure sensors;
- a central module including a reception unit, the reception unit being configured to receive data from the pressure sensor panel;
- and
- a battery configured to provide power to the pressure sensor panel and the central module,
- wherein the pressure sensor panel comprises:
- a front pressure sensor panel provided at a front of the substrate shape member, and
- a back pressure sensor panel provided at a back of the substrate shape member,
- wherein the front pressure sensor panel is configured to measure one or more of an impact point and an impact force of the first liquid chemical of the nozzle, and
- wherein the back pressure sensor panel is configured to measure one or more of an impact point and an impact force of the second liquid chemical of the back nozzle.
12 more elements
A substrate type sensor comprising:
- a substrate shape member having a substantially same physical size as a substrate;
- a front pressure sensor panel provided at a front of the substrate shape member, the front pressure sensor panel including a plurality of pressure sensors;
- a back pressure sensor panel provided at a back of the substrate shape member, the back pressure sensor panel including a plurality of pressure sensors;
- a central module provided at the front of the substrate shape member, and including a reception unit configured to receive data from the front and back pressure sensor panels and a transmission unit configured to transmit the data received from the reception unit to the outside;
- and
- a battery provided at the front of the substrate shape member and configured to provide a power to the front and back pressure sensor panels and the central module.
3 more elements
Dependencies are inferred from the claim text.