Cooling sheet attachment apparatus to focusing ring for semiconductor manufacturing apparatus

A cooling sheet attachment apparatus to a focusing ring for a semiconductor manufacturing apparatus, comprising:

• a vacuum chamber comprises:
• a sheet support ring fixed to seat a cooling sheet in a chamber body with an adhesion surface exposed in an upward direction;
• a centering jig installed on an inner or outer circumferential surface of the sheet support ring liftably to be moved back in the upward direction by an elastic support so that the focusing ring is aligned above the cooling sheet in a state of being supported by the centering jig;
• a cover for opening/closing installed above the chamber body and lifted by a lift unit, a press unit provided on the cover to press down the focusing ring so that the cooling sheet is attached to a lower surface of the focusing ring by pressing into tight contact;
• and
• a vacuum suction tube connected to the chamber body for vacuum suction;
• and
• a vacuum suction unit creating a vacuum in the vacuum chamber by the suction through the vacuum suction tube,
• wherein the sheet support ring has alignment pins protruding on an upper surface, each of the alignment pins corresponding to each of a plurality of alignment grooves formed at an interval in a circumferential direction on the lower surface of the focusing ring and inserted into each alignment groove, and is supported and fixed by a plurality of fixtures provided vertically on a lower surface of the chamber body, and the elastic support is integrally formed with the fixtures.